Tantalum pentachloride, TaCl5, forms strongly hydroscopic, needle-shaped white crystals. It is produced on an industrial scale in large tonnage by the chlorination of tantalum scrap or ferrotantalum with NaFeCl4 or by the reductive chlorination of natural ores or synthetic raw materials. High purity TaCl5 is hydrolyzed with steam and thus converted to Ta2O5 of the highest purity. The reduction of TaCl5 with Mg or Al was repeatedly attempted but this thermite-type process never attained any industrial application. TaCl5 is soluble in absolute alcohol, forming the corresponding alkoxides. The alkoxides as well as the chlorides are suitable products for the deposition of tantalum or tantalum pentoxide layers.