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TRIS(DIMETHYLAMINO)SILANE Basic information

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Product Name:

TRIS(DIMETHYLAMINO)SILANE

Synonyms:

Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok cylinder (96-1070) for CVD/ALD;TRIS(DIMETHYLAMINO)SILANE;n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin;n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine;N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine;TRIS(DIMETHYLAMINO)SILANE 99+%;Tris(dimethyamino)silane;N,N,N',N',N'',N''-hexamethyl-Silanetriamine tris(Dimethylamino)silane n,n,n',n',n'',n''-hexamethylsilanetriamine n,n,n',n',n'',n''-hexamethyl-silanetriamin Silanetriamine,N,N,N',N',N'',N''-hexamethyl-

CAS:

15112-89-7

MF:

C6H19N3Si

MW:

161.32

EINECS:

239-165-0

Product Categories:

organosilicon compounds;ALD Precursors

Mol File:

15112-89-7.mol