| Identification | Back Directory | [Name]
TRI-T-BUTOXYSILANOL | [CAS]
18166-43-3 | [Synonyms]
NSC 243646
TRI-T-BUTOXYSILANOL
TRIS(T-BUTOXY)SILANOL
Tri-tert-butoxysilanol
Tri-tert-butyl silicate
TRIS(TERT-BUTOXY)SILANOL
Tri(tert-butyloxy)silanol
Tri-t-butoxysilanol (99.9+%-Si)
Tris(tert-butoxy)silanol 99.999%
Tri-tert-butyl hydrogen orthosilicate
Tri-t-butoxysilanol (99.999%-Si) PURATREM
Silicic acid, tris(1,1-diMethylethyl) ester
Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 Ml Swagelokcylinder (96-1077) for CVD/ALD
Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 ml Swagelok(R) cylinder (96-1077) for CVD/ALD | [Molecular Formula]
C12H28O4Si | [MDL Number]
MFCD00271024 | [MOL File]
18166-43-3.mol | [Molecular Weight]
264.43 |
| Chemical Properties | Back Directory | [Melting point ]
63-65 °C(lit.)
| [Boiling point ]
205-210 °C(lit.)
| [density ]
0,92 g/cm3 | [Fp ]
>65°C | [storage temp. ]
below 5° C | [form ]
solid | [pka]
11.78±0.53(Predicted) | [Hydrolytic Sensitivity]
7: reacts slowly with moisture/water | [Sensitive ]
moisture sensitive |
| Hazard Information | Back Directory | [General Description]
Tris(tert-butoxy)silanol can react with various metal alkyl amides to act as precursors for vapor deposition metal silicates. It also acts as a suitable precursor for deposition of silica. |
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